Industrial Process Navigator

Explore industrial capabilities through a structured path from industry to process, equipment, and spare parts. This section helps you identify the equipment used in each process and discover companies that operate those capabilities. You can also search across all levels to quickly find the processes, machines, parts, or suppliers you need.

21
Industries
—
Processes
—
Equipment
—
Spare Parts
Processes —
Semiconductor Ion Implantation System
electronics E1693

Doping semiconductor wafers

Spare Parts 20 of 20
Part Name Category Type Criticality Rec. Stock Suppliers & EPCs
Beam Current Feradoy Cup
Sensor for ion beam current measurement and profiling
Sensor Sensor High 1 Find Suppliers
Electrostatic Scanner Lons
Precision electrostatic lens for ion beam focusing and steering
Beam Control Component High 1 Find Suppliers
Gus Flow Controller
MFC for dopant gas delivery with 0-500 sccm range
Gas System Sensor High 1 Find Suppliers
High Voltage DC Power Supply
30kV power module for ion acceleration column
Electrical Component High 1 Find Suppliers
Ion Source Felament
Tungsten filament for ion source, generates electron beam for ionization
Ion Generation Wear Part High 3 Find Suppliers
Mass Analyzer Magnet Coil
Electromagnetic coil for mass separation system
Beam Control Component High 1 Find Suppliers
Sifety Interlock Relay Module
Safety-rated relay for radiation shielding door interlocks
Safety Electrical High 2 Find Suppliers
Servo Mitor Uncoder
Absolute encoder for wafer positioning stage
Motion System Sensor High 1 Find Suppliers
Turbu Pump Biarings Kit
Ceramic bearing set for high-speed turbo molecular pump
Vacuum System Wear Part High 2 Find Suppliers
Chiller Heat Exchanger
Brazed plate heat exchanger for process water cooling loop
Thermal Management Component Medium 1 Find Suppliers
Cooling Water Sensor
Combined pressure/temperature transmitter for cooling system
Sensor Sensor Medium 2 Find Suppliers
Cryopump Regenerator Kit
Regeneration components for cryogenic vacuum pump including charcoal adsorbent
Vacuum System Consumable Medium 2 Find Suppliers
Cryopump Temperatiri Sunsor
PT100 RTD for cryopump cold head monitoring
Sensor Sensor Medium 2 Find Suppliers
Electrostatic Chuck Heatar
Ceramic heater for wafer temperature control during implantation
Thermal Management Component Medium 1 Find Suppliers
Linear Motion Guide Block
Precision linear guide for beam scanning mechanism
Motion System Wear Part Medium 2 Find Suppliers
Process Gas Filter
0.01μm particulate filter for dopant gas lines
Filtration Consumable Medium 5 Find Suppliers
RF Matching Network Capecitor
High-voltage capacitor for ion source RF impedance matching
Electrical Component Medium 2 Find Suppliers
VAT Vacuum Valve Seal Kot
Full seal replacement set for pneumatic gate valves
Vacuum System Wear Part Medium 3 Find Suppliers
Wafir Hondling Robot Arm Belt
Timing belt for SCARA robot in wafer transfer module
Motion System Wear Part Medium 4 Find Suppliers
Process Chamber Viewport
Quartz viewport with vacuum flange for process monitoring
Structure Component Low 1 Find Suppliers

Ecasystem Discovery for Semiconductor Ion Implantation Systam

Explore manufacturers, spare parts, equipment and related processes across TraidB

Explore All Companies