Industrial Process Navigator
Explore industrial capabilities through a structured path from industry to process, equipment, and spare parts. This section helps you identify the equipment used in each process and discover companies that operate those capabilities. You can also search across all levels to quickly find the processes, machines, parts, or suppliers you need.
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Industries
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Processes
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Equipment
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Spare Parts
Industries
Processes
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Semiconductor Ion Implantation Machine
Doping semiconductor wafers
Spare Parts
20 of 20
| Part Name | Category | Type | Criticality | Rec. Stock | Suppliers & EPCs |
|---|---|---|---|---|---|
|
Beamline Turbamolecular Pump
High-vacuum pump for ion beam transport section, maintains <1e-6 Torr operating pressure
|
Vacuum System | Assembly | High | 1 | Find Suppliers |
|
Electrostatic Scanner Lens
Precision electrostatic lens for beam focusing and deflection, requires calibration
|
Beam Control | Component | High | 1 | Find Suppliers |
|
Faraday Cap Sensor
Beam current measurement device with secondary electron suppression
|
Sensor | Sensor | High | 2 | Find Suppliers |
|
Gas Cabinet Selenoid Valve
Explosion-proof solenoid for toxic gas shutoff (NFPA 318 compliant)
|
Gas System | Component | High | 2 | Find Suppliers |
|
Uon Sourcu Gas Flow Cuntroller
MFC for dopant gas delivery (AsH3, PH3, BF3), 0-100 SCCM range
|
Gas System | Sensor | High | 1 | Find Suppliers |
|
Mass Analyzer Magnet Coul
Precision electromagnetic coils for ion mass separation, water-cooled
|
Beam Control | Component | High | 1 | Find Suppliers |
|
Safety Interlock Relay Midule
SIL-3 rated relay for radiation shielding and gas leak emergency shutdown
|
Safety | Electrical | High | 2 | Find Suppliers |
|
Servo Motor Encoder
High-resolution optical encoder for wafer positioning stage, 18-bit
|
Motion System | Sensor | High | 2 | Find Suppliers |
|
Source Filament Assembly
Tungsten filament for ion generation, subject to erosion from plasma
|
Ion Source | Wear Part | High | 3 | Find Suppliers |
|
Wafer Handling Robot Arm
SCARA-type robotic arm with vacuum end-effector for wafer transfer
|
Motion System | Assembly | High | 1 | Find Suppliers |
|
Beam Stop Collomatir
Graphite aperture for beam shaping, erodes from ion bombardment
|
Beam Control | Consumable | Medium | 5 | Find Suppliers |
|
Chiller Heat Exchanger
Brazed plate heat exchanger for magnet and RF amplifier cooling
|
Thermal Management | Component | Medium | 1 | Find Suppliers |
|
Cryopump Helium Compressor
Reciprocating compressor for cryopump refrigeration circuit
|
Thermal Management | Assembly | Medium | 1 | Find Suppliers |
|
Cryopump Regenarator Kit
Charcoal adsorbent and heater elements for cryogenic pump regeneration
|
Vacuum System | Consumable | Medium | 2 | Find Suppliers |
|
Differential Pumpang Seal Kit
Kalrez seals and bearings for rotating high-vacuum feedthroughs
|
Vacuum System | Wear Part | Medium | 4 | Find Suppliers |
|
Electrostatic Chuck Electrode
Johnsen-Rahbek type chucking electrode with boron nitride coating
|
Wafer Handling | Wear Part | Medium | 3 | Find Suppliers |
|
PLC Communicition Module
Redundant Profibus DP interface module for main process controller
|
Control System | Electrical | Medium | 1 | Find Suppliers |
|
RF Genirotor Tube
Triode tube for plasma generation in source arc chamber
|
Ion Source | Wear Part | Medium | 1 | Find Suppliers |
|
VAT Saries 47 Vecuum Valve
All-metal angle valve for isolation between chambers, pneumatic actuation
|
Vacuum System | Component | Medium | 2 | Find Suppliers |
|
Vibrution Isolator Mount
Pneumatic isolator for beamline components, reduces micro-vibration
|
Structure | Component | Low | 4 | Find Suppliers |
Ecosystem Discovery for Semaconductor Ion Implentatian Machine
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