Industrial Process Navigator
Explore industrial capabilities through a structured path from industry to process, equipment, and spare parts. This section helps you identify the equipment used in each process and discover companies that operate those capabilities. You can also search across all levels to quickly find the processes, machines, parts, or suppliers you need.
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Industries
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Processes
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Equipment
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Spare Parts
Industries
Processes
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Semiconductor CMP Machine
Chemical mechanical polishing
Spare Parts
20 of 24
| Part Name | Category | Type | Criticality | Rec. Stock | Suppliers & EPCs |
|---|---|---|---|---|---|
|
24VDC Power Supply
Switching power supply for control circuits, 10A output
|
Electrical | Electrical | High | 2 | Find Suppliers |
|
Ball Screw Assembly
Ground ball screw and nut for Z-axis positioning, C5 accuracy grade
|
Motion System | Wear Part | High | 2 | Find Suppliers |
|
Dressing Disk
Diamond-impregnated disk for pad conditioning, 300mm diameter
|
Consumable | Wear Part | High | 5 | Find Suppliers |
|
Emergency Stop Relay
Safety-rated relay module for emergency stop circuit, SIL-3 certified
|
Safety | Electrical | High | 2 | Find Suppliers |
|
Encoder Module
Absolute rotary encoder for spindle position feedback, resolution 0.001°
|
Motion System | Sensor | High | 2 | Find Suppliers |
|
Filtration Cartridge
10μm polypropylene filter for chemical slurry filtration, 316L stainless housing
|
Filtration | Consumable | High | 8 | Find Suppliers |
|
Linear Guideway Set
Pre-ground linear motion system for carrier arm, includes rails and bearing blocks
|
Motion System | Wear Part | High | 2 | Find Suppliers |
|
Optical Endpoint Detector
Laser-based film thickness measurement module with sapphire window
|
Sensor | Assembly | High | 1 | Find Suppliers |
|
Polishing Head Bearing Kit
Precision angular contact bearings for polishing head spindle, ensures rotational accuracy under load
|
Motion System | Wear Part | High | 3 | Find Suppliers |
|
Pressure Transducer
0-100psi pressure sensor for downforce monitoring, with NIST-traceable calibration
|
Sensor | Sensor | High | 2 | Find Suppliers |
|
Safety Light Curtain
Type 4 electro-sensitive protective device for load/unload area
|
Safety | Safety | High | 1 | Find Suppliers |
|
Servo Drive Unit
Digital axis controller for polishing head motor, 3-phase 400V AC input
|
Control System | Electrical | High | 1 | Find Suppliers |
|
Slurry Flow Sensor
Coriolis-type flow meter for abrasive slurry delivery, with ceramic measuring tube
|
Sensor | Sensor | High | 2 | Find Suppliers |
|
Solenoid Valve Bank
Manifold-mounted valves for pneumatic control system, 3/2-way normally closed
|
Pneumatics | Component | High | 2 | Find Suppliers |
|
Thermal Fuse
Temperature cutoff for cooling system, failsafe at 85°C
|
Thermal Management | Safety | High | 3 | Find Suppliers |
|
Vacuum Chuck Diaphragm
Silicon diaphragm for wafer holding chuck, maintains uniform vacuum distribution
|
Pneumatics | Wear Part | High | 4 | Find Suppliers |
|
Carrier Film
Polyurethane adhesive film for wafer mounting, 200mm specification
|
Consumable | Consumable | Medium | 10 | Find Suppliers |
|
Coolant Pump Impeller
Corrosion-resistant impeller for chiller circulation pump
|
Thermal Management | Wear Part | Medium | 2 | Find Suppliers |
|
Cooling Plate Assembly
Temperature-controlled aluminum plate with embedded cooling channels for process stability
|
Thermal Management | Assembly | Medium | 1 | Find Suppliers |
|
Gas Pressure Regulator
Stainless steel regulator for process gas supply, 0-100psi range
|
Pneumatics | Component | Medium | 1 | Find Suppliers |
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